Imaging Spectroscopic Ellipsometry is an all-optical, non-contact metrology technique that excels at the layer-thickness and material characterization of micro structured thin-film samples and substrates.
The technique combines microscope imaging with the measurement principles of spectroscopic ellipsometry. It reaches a superior spatialresolution easily beating the limits of other optical metrology tools such as regular ellipsometers or reflectometers.
Applications: 2D materials, Curved Surfaces, Transparent Substrate, Surface Engineering, Air-Water Interface, Anisotropic Films, Bio Interfaces, MEMS, Photonics, Displays, Battery Materials
Accurion EP4 imaging ellipsometer, from UV to NIR
Accurion EP4 combines ellipsometry and microscopy for precise characterization of thickness andrefractive index on microstructures as small as 1 µm.
- All structures inside the field of view are measured simultaneously, spectroscopic Ellipsometry on each pixel
- Parallel measurement of multiple regions within the selected field of view
- Highest Lateral Ellipsometric Resolution
- Ellipsometric enhanced contrast images for a live visualization of the sample
- Intuitive selection of measurement region by drawing regions in live ellipsometry view.
- Accessories are available to expand measurements under controlled conditions or temperature variations
- Quality Control: also available as OEM version for QC in product lines
Accurion SIMON, Your Entry to Imaging Ellipsometry
SIMON is specifically designed for routine measurement tasks and to automatically stitch large areas with smooth transitions
It can be operated in two different modes:
- Microscopic mode is very fast and allows visualizations of variations and defects in the thinnest layers
- Ellipsometry mode measures thickness and the refractive index of the sample materials
The combination of ellipsometry and microscopy allows to measure the thickness maps of your sample
- Easy-to-use entry-level Imaging Ellipsometer
- Fast visualization of layer thickness distribution and hidden defects on large areas
Get in touch with our Product Specialist Claudia at the Romanian office: claudia.moldovan@schaefer-scientific.com
