Discover the Phenom XL G3 desktop SEM
The third generation Phenom XL combines unrivalled speed, sharper images and maximum uptime.

Desktop-Scanning Electron Microscope (SEM) with EDX Option
The Phenom Electron Microscopes are not only smaller, simpler and cheaper than a floor-model. Thanks to their low vacuum in sample chamber they are faster and do not require any coating for non-conductive surfaces!
The product line consists of:
- Phenom XL (For large samples up to 100x100mm, 62mm height)
- Phenom Pro, ProX, Pure (Magnification up to 350,000 x, resolution 6-8nm)
- Phenom Pharos (Field Emission Cathode for highest resolution, magnification up to 2,000,000 x !)
- Phenom GSR (Automated Gunshot Residue Analyse for forensic solutions)
- Phenom Particle X (Automated particle analysis according to VDA19/ISO16232 for technical purity and additive manufacturing)
- Axia ChemiSEM (floor-model for samples with up to 10 kg weight)
As an option, all systems can be upgraded with SED and EDX detectors. The acceleration voltage can vary between 2 and 20.5 kV.
UNDER THIS EMAIL ADDRESS YOU CAN INQUIRE ABOUT SERVICE FOR PHENOM.

PHENOM PRO, ProX (350,000x, <8nm Resolution, EDX Elemental Analysis)
- Excellent image quality thanks to the CeB6 source with high brilliance at low acceleration voltages
- Ca. 1500 working hours of the source (4-6 years of typical use)
- Magnification up to 350,000x (plus 12x digital zoom)
- Variable acceleration voltage (for ProX and XL)
- EDX elemental analysis (optional for Phenom Pro and Pure)
- Optional SED Detector
- Fast sample preparation
- Easy and fast sample transfer (10-15 seconds)
- Intuitive navigation
- Motorized precision-XY stage
- Color CCD camera incl. zoom 20x up to 120x (Pro and ProX)
- Robust, space-saving construction; straightforward operation
- As options: 3D reconstruction, surface roughness measurement, stitching and automatic measurement of fiber cross-sections.
ParticleMetric Software (Particle Measurement)
Phenom XL G2(200,000 x, <9nm Resolution with Optional EDX Elemental Analysis and SE Detector)
- Excellent image quality thanks to the CeB6 source with high brilliance at low acceleration voltages
- Ca. 3000 working hours of the source (4-6 years of typical use)
- Magnification up to 200,000x (plus 12x digital zoom)
- Variable acceleration voltage 2 – 20.5 kV
- Opional EDX Detector (25 & 70 mm²)
- Optional SED Detector
- Fast sample preparation
- Easy and fast sample transfer (30-40 seconds)
- Intuitive navigation
- Optional 5-axis stage (XYZTR)
- Robust, space-saving construction; straightforward operation
- As options: 3D reconstruction, surface roughness measurement, stitching and automatic measurement of Asbestos Filter Analysis.
ParticleMetric Software (Particle Measurement)

Phenom Pharos G2 FEG-SEM (2,000,000 x, 2nm Resolution with Optional EDX Elemental Analysis and SE Detector)
- Field Emission Cathode with excellent 2nm resolution
- COMPETITIVE WITH FLOOR-MODELS
- High Vacuum Mode
- Medium Vacuum Mode
- Integrated Charge Reduction (Low Vacuum Mode)
- Standard: 5/10/15/20 kV easy use
- Extended mode: adjustable between 1 kV and 20 kV
- Backscattered Electron Detector (Standard)
- Detector for Energy Dispersive X-Ray Spectroscopy (EDS/EDX) (optional)
- Secondary Electron Detector (Everhart Thornley-optional)
- Sample size up to 25 mm diameter (32 mm optional)
- Sample height up to 35 mm (100 mm optional)
Phenom GSR (Gun Shot Residue, ASTM E1588-17 compatible)
- Sample size max. 100 mm x 100 mm (up to 30 x 12 mm Pin Stubs), max. 40 mm (Height)
- Software specifications:
- Complies with ASTM E1588-17
- Typically ≥ 98 % match with standardized Plano-GSR-samples
- Supports classification of lead-free ammunition types
- Automatic Calibration for reproducible results
- Detector types
- Silicon-Drift-Detektor (SDD)
- Peltier-chilling (LN2-frei)
- Reporting-Workflow: Particle drift, user-friendly reporting system
- Acquisition-mode: 316 (W) x 587 (L) x 625 (H) mm
Phenom ParticleX (200,000 x, <10nm Resulution, EDX Elemental Analysis and SED as Options)
- Excellent solution for reliable MATERIAL ANALYSIS, e.g. for AUTOMOTIVE INDUSTRY
- Technical purity check on micrometer scale thanks to EDX Analysis
- Acceleration voltages:
- Standard: 5 kV, 10 kV and 15 kV (expanded mode: adjustable range between 4,8 kV and 20,5 kV)
- Vacuum levels
- Low
- Medium
- High
- Detectors:
- Backscattered-Electron-Detector (standard)
- Detector for energydispersive X-Ray spectroscopy (EDS) (standard)
- Secondary electron detector (Everhart-Thornley-Detector, optional)
- Sample size:
- max. 100 mm x 100 mm (up to 36 x 12 mm stubs)
- max. 40 mm (h)
- Exemplary transfer time
- Light-optical <5 s
- SEM <60 s
Axia ChemiSEM (1,000,000x Polaroid Resolution, up to 3 nm Resolution, ideal for EDX Analysis)
- Semi-Floor-Model
- Maintenance-friendly (the source can be easily exchanged by the user)
- Motorized, retractable backscattered detector
- TrueSight EDS-Detector
- Nav-Cam Camera – optical color camera for sample navigation
- Manual user interface
- IR-Chamber-Camera
- Maps Software for Tiling and Stitching the images
- Electron beam resolution:
- 3,0 nm at 30 kV (SE)
- 3,0 nm at 30 kV (SE) (low vacuum)
- 8,0 nm at 3 kV (SE)
- 7,0 nm at 3 kV (BD-Modus* + BSE)
- Chamber:
- inner width: 280 mm
- Contacts: an Axia ChemiSEM scanning electron microscope with BSED and EDS offers 5 available ports
- Stage:
- xy: 120 x 120 mm
- Tilt: -15 bis +90 Grad
- Rotation: n x 360°
- With removed ZTR-Axis:
- Max. Sample height: 128 mm
- Max. Sample weight: 10 kg
- Typical options
- Beam Deceleration Mode
- CleanHeater for Stage (up to 1.100 °C)
- Cathode Luminescence Detector
- AutoScript 4 Software – Python-based application programming interface
- Thermo Scientific TopoMaps Software for image coloring, image analysis and 3D surface reconstruction
Applications
- Pharmaceutical Industry
- powder
- Particle size measurement
- Nanoparticles
- Metallurgical Analysis
- Process control
- Quality control
- Research laboratories
- Fibermetric for the analysis of textile fibers
- Asbestos analysis according to VDI 3492 (with AsbestosScan software)
- Technical purity according to VDA19 / ISO16232
- Additive manufacturing (quality control)
- Table SEM, table electron microscope, tabletop SEM
- EDX, EDS

