White light interferometry is one of the proven optical measurement techniques for recording 3D topographies with depth resolution in the lower nanometre range. As the measuring points are recorded and processed in parallel, the height information can be recorded over a large area in a very short time.
The smartWLI product family offers innovative solutions based on this measuring principle. The entire measurement process is controlled and analysed using the proven smartWLI software. The efficient, robust and highly accurate analysis algorithms are the result of extensive research and experience in this field.
Typical applications in research and quality management include the characterisation of surfaces with different roughness parameters (wafer structures, mirrors, glass, metals), the determination of step heights and the precise measurement of curved surfaces such as microlenses.
SmartWLI Extended
Stand-alone 3D surface white light interferometer. The system includes a nosepiece and a motorised XY stage. This means that samples that are larger than the objective’s field of view can also be measured (stitching).
SmartWLI Prime
The SmartWLI-Prime enables the measurement of sample surfaces with nanometre resolution. The subsequent analysis is carried out on a laptop or desktop PC.
Thanks to its compact design, the device can be used in a wide variety of environments. In addition to research applications, typical applications include quality management and process control. Thanks to its fast and precise measurement technology, the SmartWLI-Prime is ideal for determining the necessary parameters for product and process quality.
SmartWLI Microscope
Classic light microscopes can be upgraded to fully-fledged 3D profilometers to significantly expand their range of applications.
In addition to microscopy images, precise 3D data of the surface within the objective’s field of view can be measured and analysed.
Available as an upgrade for all common reflected light microscopes from various manufacturers: Zeiss, Nikon, Mitutoyo, Olympus, Leica, etc.
SmartWLI Cylinderinspector
White light interferometer, especially for non-contact measurement of cylindrical surfaces.
